Our Plants
Kitakyushu Plant
A production center that supplies high-quality specialty gases
mainly to countries in Asia and to the Kyushu, Chugoku and Shikoku areas in Japan
Characteristics
The Kitakyushu Plant acts as a center of production and supply of specialty gases mainly for countries and areas such as Taiwan, South Korea and China, and for the Kyushu, Chugoku and Shikoku regions in Japan. It has long supported the development of the semiconductor industry in Japan, responding flexibly to the needs of a broad range of customers, from research institutes to large-scale factory lines, by delivering from one cylinder to large volume lots.
In recent years, it has reinforced its supply framework, such as by expanding its production facility in response to increasing demand for B2H6 (diborane) and PH3 (phosphine).
Main products handled
- High-purity gases (carrier gases, gases for atmosphere control, etc.)
- Semiconductor process gases (for doping, epitaxial processes, filming, cleaning, etching, etc.)
- Mixture gases (for heat treatment of metals, iron ore reduction tests, welding, laser oscillation, etc.)
TOPIC
Bonded warehouse
The Kitakyushu Plant’s bonded warehouse (area of over 350m2) has the function of storing gas pursuant to the High Pressure Gas Safety Act and the function of providing customs clearance services. It can thus respond even to high-volume demands from overseas in a timely manner.
Receiving raw materials
Raw materials yard
Raw material gases that are handled in large volumes are received in large, dedicated bulk tanks. They are then compressed, refined and stored at high pressure, and thereafter sent to each filling room via high-pressure pipes to realize high-efficiency production.
Automatic base gas analyzer
After receiving them, base gases (N2, Ar, He, H2) are thoroughly analyzed and inspected with regard to the rate of impurities (CO, CO2, CH4) contained therein. Only gases that clear the company’s original rigid standards are used.
Filling
B2H6filling stand
In addition to applying special treatment to the inside surface of cylinders, cylinders are discharged of residual gas, vacuumed, and filled at the highest level of quality assessment standards.
Analysis & inspection
Analysis room
Analyzers are strictly calibrated and managed in reference to high-precision standard gases, and high-sensitivity analyses are carried out by installing dedicated analyzers for each type of gas. All products are shipped only after their composition is analyzed and they are inspected for impurities.The composition of semiconductor process gases, such as PH3 and B2H6, is analyzed using an automatic analyzer.
Bulk supply
CF4supply in bundles
For customers who use large volumes of gas, products (CF4, CO, He, Ar) may be supplied in units of special bundles designed for large-scale supply.
Cylinder management
Cylinder storage room
Each specialty gas cylinder is stored and managed by type and supply destination, while maintaining security and quality. B2H6 cylinders are temperature-controlled in a dedicated cold storage room, as they need to be kept at low temperatures.
